GaN membrane metal-semiconductor-metal ultraviolet photodetector

Appl Opt. 2008 Apr 1;47(10):1453-6. doi: 10.1364/ao.47.001453.

Abstract

GaN is a wide-bandgap semiconductor with still unexplored capabilities for ultraviolet detection. To exploit GaN properties better for ultraviolet detection, a metal-semiconductor-metal-type photodetector structure was designed and manufactured on a 2.2 microm thin GaN membrane fabricated by micromachining techniques. As a result, a very low dark current (30 pA at 3 V) and a maximum responsivity of 14 mA/W at a wavelength of 370 nm were obtained.