CMOS-micromachined, two-dimenisional transistor arrays for neural recording and stimulation

Annu Int Conf IEEE Eng Med Biol Soc. 2007:2007:2365-8. doi: 10.1109/IEMBS.2007.4352802.

Abstract

In-plane microelectrode arrays have proven to be useful tools for studying the connectivities and the functions of neural tissues. However, seldom microelectrode arrays are monolithically-integrated with signal-processing circuits, without which the maximum number of electrodes is limited by the compromise with routing complexity and interferences. This paper proposes a CMOS-compatible, two-dimensional array of oxide-semiconductor field-effect transistors(OSFETs), capable of both recording and stimulating neuronal activities. The fabrication of the OSFETs not only requires simply die-level, post-CMOS micromachining process, but also retains metal layers for monolithic integration with signal-processing circuits. A CMOS microsystem containing the OSFET arrays and gain-programmable recording circuits has been fabricated and tested. The preliminary testing results are presented and discussed.

Publication types

  • Research Support, Non-U.S. Gov't

MeSH terms

  • Algorithms
  • Amplifiers, Electronic
  • Electrodes, Implanted
  • Equipment Design
  • Humans
  • Iridium / chemistry
  • Materials Testing
  • Microcomputers*
  • Microelectrodes*
  • Models, Theoretical
  • Nervous System / pathology*
  • Neurons / pathology
  • Platinum / chemistry
  • Silicon / chemistry
  • Transistors, Electronic*

Substances

  • Iridium
  • Platinum
  • Silicon