Digital holographic microscopy in the deep (193 nm) ultraviolet

Appl Opt. 2007 Nov 10;46(32):7829-35. doi: 10.1364/ao.46.007829.

Abstract

We present a system based on digital holography suitable for the investigation of microscopic objects. To increase the resolution of the system a deep (193 nm) UV laser source has been used. A method for compensating aberrations due to the non-perfect optical elements used for the recording has been developed. The system allows the investigation of reflecting and transmitting samples.