Synthesis and characterization of diorganohydrazido(2-) tungsten complexes

Jürgen Koller; Hiral M Ajmera; Khalil A Abboud; Timothy J Anderson; Lisa McElwee-White

doi:10.1021/ic701151m

Synthesis and characterization of diorganohydrazido(2-) tungsten complexes

Inorg Chem. 2008 Jun 2;47(11):4457-62. doi: 10.1021/ic701151m. Epub 2007 Sep 15.

Authors

Jürgen Koller¹, Hiral M Ajmera, Khalil A Abboud, Timothy J Anderson, Lisa McElwee-White

Affiliation

¹ Department of Chemistry, University of Florida, Gainesville, FL 32611-7200, USA.

PMID: 17867680
DOI: 10.1021/ic701151m

Abstract

Diorganohydrazido(2-) complexes of tungsten (L)Cl4W(NNR2) [R2=Me2, Ph2, -(CH2)5-; L=CH3CN, pyridine] were synthesized by reacting the corresponding 1,1-diorganohydrazine with WCl6, followed by reaction with acetonitrile or pyridine. Crystallographic structure determination of (CH3CN)Cl4W(NNMe2) and (CH3CN)Cl4W(NNPh2) allows a comparison of the structural features of the diorganohydrazido(2-) functionality with varying substituents. Mass spectrometry, thermogravimetric analysis, and preliminary chemical vapor deposition experiments were performed to determine the viability of these complexes as single-source precursors for deposition of WNx and WNxCy films.