Mass detection using capacitive resonant silicon resonator employing LC resonant circuit technique

Rev Sci Instrum. 2007 Aug;78(8):085103. doi: 10.1063/1.2766840.

Abstract

Capacitive resonant mass sensing using a single-crystalline silicon resonator with an electrical LC oscillator was demonstrated in ambient atmosphere. Using capacitive detection method, the detectable minimum mass of 1 x 10(-14) g was obtained in the self-oscillation of cantilever with a thickness of 250 nm. The noise amplitude of the sensor output corresponds to a vibration amplitude of 0.05 nm(Hz)(0.5) in the frequency domain compared with the actuation signal, which is equivalent to the detectable minimum capacitance variation of 2.4 x 10(-21) F. Using the capacitive detection method, mass/stress induced resonance frequency shift due to the adsorption of ethanol and moist vapor in a pure N(2) gas as a carrier is successfully demonstrated. These results show the high potential of capacitive silicon resonator for high mass/stress-sensitive sensor.

Publication types

  • Research Support, Non-U.S. Gov't

MeSH terms

  • Computer-Aided Design
  • Electric Capacitance
  • Equipment Design
  • Equipment Failure Analysis
  • Gases / analysis
  • Gases / chemistry*
  • Microelectrodes*
  • Molecular Weight*
  • Plethysmography, Impedance / instrumentation*
  • Plethysmography, Impedance / methods
  • Reproducibility of Results
  • Sensitivity and Specificity
  • Silicon
  • Transducers*

Substances

  • Gases
  • Silicon