Regular dislocation networks in silicon as a tool for nanostructure devices used in optics, biology, and electronics

Small. 2007 Jun;3(6):964-73. doi: 10.1002/smll.200600539.

Abstract

Well-controlled fabrication of dislocation networks in Si using direct wafer bonding opens broad possibilities for nanotechnology applications. Concepts of dislocation-network-based light emitters, manipulators of biomolecules, gettering and insulating layers, and three-dimensional buried conductive channels are presented and discussed. A prototype of a Si-based light emitter working at a wavelength of about 1.5 microm with an efficiency potential estimated at 1% is demonstrated.

Publication types

  • Research Support, Non-U.S. Gov't

MeSH terms

  • Biology / instrumentation*
  • Electronics / instrumentation*
  • Electrons
  • Luminescence
  • Microscopy, Electron, Transmission
  • Nanostructures*
  • Optics and Photonics / instrumentation*
  • Silicon / chemistry*

Substances

  • Silicon