A recurrent radial basis function network (RBFN) based fuzzy neural network (FNN) control system is proposed to control the position of an X-Y-theta motion control stage using linear ultrasonic motors (LUSMs) to track various contours in this study. The proposed recurrent RBFN-based FNN combines the merits of self-constructing fuzzy neural network (SCFNN), recurrent neural network (RNN), and RBFN. Moreover, the structure and the parameter learning phases of the recurrent RBFN-based FNN are performed concurrently and on line. The structure learning is based on the partition of input space, and the parameter learning is based on the supervised gradient decent method using a delta adaptation law. The experimental results due to various contours show that the dynamic behaviors of the proposed recurrent RBFN-based FNN control system are robust with regard to uncertainties.