Soft lithographic techniques were used to fabricate polymeric microparticles for drug delivery applications. The microparticles were made of thermoplastics and thermosets from different types of precursors including reactive resin and polymer solutions in organic solvents or water. The microparticles produced using these methods were made of widely used polymers for drug delivery with highly uniform sizes, plate-like morphology, and well-defined lateral sizes and shapes, making them potentially useful for drug delivery applications and as platform for the construction of multi-functional drug delivery devices.