Solidly mounted ZnO shear mode film bulk acoustic resonators for sensing applications in liquids

IEEE Trans Ultrason Ferroelectr Freq Control. 2006 Feb;53(2):492-6. doi: 10.1109/tuffc.2006.1593389.

Abstract

Solidly mounted film bulk acoustic resonators (FBAR) operating at 850 MHz in the shear vibration mode have been fabricated. C-axis inclined zinc oxide (ZnO) thin films realized by modified reactive magnetron sputtering were used: Coupling factors k2 of 1.7% and Q-factors of 312 were determined in air. Q-factors of 192 were measured in water, making these devices attractive for sensing applications in liquids, e.g., biosensing.

Publication types

  • Evaluation Study
  • Letter
  • Research Support, Non-U.S. Gov't

MeSH terms

  • Biosensing Techniques / instrumentation*
  • Biosensing Techniques / methods*
  • Complex Mixtures / analysis*
  • Equipment Design
  • Equipment Failure Analysis
  • Membranes, Artificial
  • Solutions
  • Transducers*
  • Zinc Oxide / chemistry*

Substances

  • Complex Mixtures
  • Membranes, Artificial
  • Solutions
  • Zinc Oxide