Diffusion of hydrosilanes from the control layer to the vinylsilane-rich flow membrane during the fabrication of microfluidic chips

Dong-Jie Guo; Shou-Jun Xiao; Hong-Bo Liu; Jie Chao; Bing Xia; Jing Wang; Jia Pei; Yi Pan; Zhong-Ze Gu; Xiao-Zeng You

doi:10.1021/la0514866

Diffusion of hydrosilanes from the control layer to the vinylsilane-rich flow membrane during the fabrication of microfluidic chips

Langmuir. 2005 Nov 8;21(23):10487-91. doi: 10.1021/la0514866.

Authors

Dong-Jie Guo¹, Shou-Jun Xiao, Hong-Bo Liu, Jie Chao, Bing Xia, Jing Wang, Jia Pei, Yi Pan, Zhong-Ze Gu, Xiao-Zeng You

Affiliation

¹ State Key Laboratory of Coordination Chemistry, School of Chemistry and Chemical Engineering, Nanjing University, China.

PMID: 16262310
DOI: 10.1021/la0514866

Abstract

During the fabrication of poly(dimethylsiloxane) (PDMS)-based microfluidic chips, polymethylhydrosiloxane (PMHS) species in the control layer diffuse into the flow membrane, which contains polymethylvinylsiloxane (PMVS), and the components cross-link together to form the mechanically enhanced membrane. The diffusion course was investigated by using attenuated total reflectance FTIR and the improvement of mechanical properties of the flow membrane was studied by measuring the Young's modulus and the tensile strength.