Ion beam enhanced deposition (IBED) has been applied to prepare titanium oxide layer on titanium alloy (Ti6A14V) in order to improve its biocompatibility. The layer on titanium alloy is even, and the elements Al and V in substrate are not detected. The layer is composed of TiO containing nitrogen oriented along (111) plane. The critical load of the layer in scratch test is 16.8 N. Morphological observation reveals the layer ends in a failure caused by plastic deformation.