This paper reports on the setup for a high-throughput impedance measurement system that allows rapid screening of the electrical and dielectrical properties of solid-state sample libraries in variable atmospheres and temperatures. Using multielectrode arrays, most time-consuming steps in the workflow are parallelized. In addition, an approach for automated data evaluation of impedance spectra is presented. For reasons of verification of robust measuring results and reproducibility, screening results of a sample library composed of doped indium(III) oxide as a resistive-type gas-sensing material are discussed on the basis of the determined sensitivities focusing temperature and testing gas gradients.