New trialkoxysilyl group-containing copolymers for humidity-sensitive polyelectrolytes were prepared by copolymerization of [2-(methacryloyloxy)ethyl]trimethyl ammonium chloride (METAC), 3-(trimethoxysilyl)propyl methacrylate (TSPM) and 2-ethylhexyl acrylate (2-EHA). They were self-crosslinkable copolymers composed of different contents of METAC/TSPM/2-EHA = 4/1/5 and 4/2/4. The resistance varied from 10(7) to 10(3)[capital Omega] between 20% RH and 95% RH, which was required for a humidity sensor operating at ambient humidity. Temperature dependence, hysteresis, response time, water durability and long-term stability at high temperature and humidity were also measured and estimated.