On the use of grazing-incidence small-angle X-ray scattering (GISAXS) in the morphological study of ion-implanted materials

J Synchrotron Radiat. 2004 May 1;11(Pt 3):272-7. doi: 10.1107/S0909049504002523. Epub 2004 Apr 21.

Abstract

Grazing-incidence small-angle X-ray scattering has become a widely used technique for the morphological analysis of surface systems. Here it is show how this technique can be applied to a buried system, like metallic clusters in glass obtained by ion implantation. The optimization of the data-collection geometry is described as well as the details of the quantitative data analysis. An experimental example on Cu + Au-implanted glasses shows the potentiality of the technique.