Designing a non-volatile imaging switch for mass-persistent, chemically amplified photolithography: a model study

Chem Commun (Camb). 2002 Dec 21:(24):2956-7. doi: 10.1039/b209695a.

Abstract

An acid catalysed rearrangement that transforms a bicyclic lactone into a phenolic carboxylic acid has been tested for potential use in chemically amplified microlithographic imaging.