Piezoelectric thick film ultrasonic transducers fabricated by a sol-gel spray technique

M Kobayashi; T R Olding; M Sayer; C K Jen

doi:10.1016/s0041-624x(02)00390-6

Piezoelectric thick film ultrasonic transducers fabricated by a sol-gel spray technique

Ultrasonics. 2002 Oct;39(10):675-80. doi: 10.1016/s0041-624x(02)00390-6.

Authors

M Kobayashi¹, T R Olding, M Sayer, C K Jen

Affiliation

¹ Department of ECE, McGill University, Montreal, Quebec, Canada H3A 2A7.

PMID: 12479598
DOI: 10.1016/s0041-624x(02)00390-6

Abstract

Thick film broadband ultrasonic transducers (UTs) produced by a sol-gel spray technique and operated below 10 MHz are presented. These UTs are formed by dispersing PZT and LiTaO3 particles, respectively in Al2O3 and PZT sol-gel solution. The 50-100 microm thick films have been deposited on curved steel, flat steel and aluminum substrates and steel rods. Ultrasonic pulse-echo signals with a signal to noise ratio of more than 25 dB are experimentally obtained for the operating temperatures up to 250 degrees C.