Thin layers of ZnS-CuInS(2) mixed crystals (called ZCIS) are promising absorber materials for thin film solar cell applications. The ZCIS-films investigated in this study were grown on (001)GaP, SiO(2) and CeO(2)/Al(2)O(3) with different elemental compositions by Pulsed Laser Deposition (PLD). In order to optimize the sample preparation process a quantitative three-dimensional (i.e. laterally and depth resolved) determination of the compositions and thicknesses of the ZCIS-films is needed. It is demonstrated how this difficult analytical task can be addressed with ion microbeam analysis. For this purpose the films have been analysed non-destructively by means of Rutherford Backscattering Spectrometry (RBS) and Particle Induced X-ray Emission (PIXE) using a 2 MeV He(+) ion microbeam at the high-energy ion nanoprobe LIPSION. A large variation in film thickness caused by particulates deposited on the film was observed. The elemental compositions of the film and the particulates have been determined and compared with the target composition. The deviations found varied substantially for the individual elements. It could be concluded from these measurements, that the quality of the sintered PLD-target is of crucial importance for the roughness of the films. Furthermore concentration-depth-profiles of the individual elements have been derived non-destructively by means of RBS.