Microwave heating was employed for preparation of the standard gas of volatile organic compounds (VOCs) and semivolatile organic compounds (semi-VOCs) by using a 1000 W commercial domestic microwave oven and 1 L gas-sampling bulbs. The VOCs investigated were benzene, chloroform, 1,3-dichlorobenzene, tetrachloroethylene, toluene, and 1,1,2-trichloroethane, and the semi-VOCs used were the polychlorinated biphenyls (PCBs) PCB 1016 and PCB 1248. Since these weakly or nonpolar molecules are very poor absorbers of microwave energy, an appropriate amount of water was introduced to accept microwave radiation and act as the thermal source to accelerate their evaporation. The glass bulb may also contribute thermal energy to the VOCs/semi-VOCs by accepting microwave energy to a small degree. For 0.5 microL of liquid VOCs on 10 mg of glass wool, it was shown that 15 microL of H2O and 60 s of microwave heating yielded a very efficient evaporation [97.2-106.4%, compared with a classic method (Muller, L; Gorecki, T.; Pawliszyn, J. Fresenius' J. Anal. Chem. 1999, 364, 610-616)]. For 1 microL of PCB solution (1000 microg/mL in hexane), 15 microL of H2O and 90 s of microwave heating also provided a complete evaporation. The addition of water was particularly significant for microwave-assisted evaporation of PCBs because semi-VOCs are much more difficult to evaporate than VOCs. This developed microwave technique proved to be quite simple, powerful, rapid, accurate, and safe for the preparation of VOC/semi-VOC standard gas. Solid- phase microextraction combined with gas chromatography was used for the gas analysis.