A series of beta-(trimethylsilyl)ethoxymethyl ethers were hydrolyzed to their corresponding alcohols in high yields by using a catalytic amount of CBr4 (15%) in MeOH under refluxing reaction conditions. The chemoselective deprotection between trialkylsilyl and beta-(trimethylsilyl)ethoxymethyl-protected alcohols can be achieved by using an alcohol with steric hindrance such as iPrOH. The selectivity also can be achieved in the CBr4/MeOH reaction mixture under ultrasonic reaction conditions.