Formation of negative ion clusters from GeH4 has been studied as a function of germane pressure, in the 25-450 mTorr range, by chemical ionisation mass spectrometry. At the lowest pressures, only the GeHn- (n = 0-3) ion family is formed, whilst at increasing pressures GemHn- (m = 1-9) ion clusters of increasing size are observed in the mass spectra. A variable contribution of the ions with different hydrogen content is observed as a function of the pressure of germane in all the GemHn- (m = 1-9) clusters. Increasing pressures induce a general increase of ion species with a low content of hydrogen atoms. In fact, at 450 mTorr, 38% of the ion current is due to the bare Gem- (m = 2-5) clusters and 83% to the sum of abundances of the GemHn- ions without hydrogen (n = 0) and with a number of hydrogen atoms not higher than the number of germanium atoms (n = 0-m). This trend suggests that a contribution of negative clusters to the deposition of the amorphous solid a-Ge:H from gaseous systems containing GeH4, activated by radiolytic methods, can enhance the formation of solids with a low hydrogen content, which show better photoelectrical properties.
Copyright 2001 John Wiley & Sons, Ltd.